CMOS compatible integration of Si/SiO_2 multilayer GRIN lens optical mode size converter to Si wire waveguide | Zendy

Ter-Hoe Loh | Zendy; Qian Wang | Zendy; Keh-Ting Ng | Zendy; Yi-Cheng Lai | Zendy; SengTiong Ho | Zendy

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CMOS compatible integration of Si/SiO_2 multilayer GRIN lens optical mode size converter to Si wire waveguide

Author(s) -

Ter-Hoe Loh,

Qian Wang,

Keh-Ting Ng,

Yi-Cheng Lai,

SengTiong Ho

Publication year - 2012

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.20.014769

Subject(s) - materials science , optics , lens (geology) , waveguide , optical fiber , coupling loss , optoelectronics , coupling (piping) , focal length , cmos , single mode optical fiber , physics , metallurgy

We present a CMOS compatible mass manufacturable, compact Si/SiO(2) multilayer GRIN lens mode size converter from standard single mode fiber to 300 nm-thick Si waveguide. The fiber-to-GRIN lens coupling loss is 2.6 ± 0.3 dB (coupling efficiency: 51~60%) with optimized focal length of 11.6~11.8 μm and Si/SiO(2) multilayer thickness of 7.4 μm.

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