Open AccessCMOS compatible integration of Si/SiO_2 multilayer GRIN lens optical mode size converter to Si wire waveguide
Author(s) -
Ter Hoe Loh,
Qian Wang,
Keh Ting Ng,
Yi Cheng Lai,
Seng-Tiong Ho
Publication year - 2012
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.014769
Subject(s) - materials science , optics , lens (geology) , waveguide , optical fiber , coupling loss , optoelectronics , coupling (piping) , focal length , cmos , single mode optical fiber , physics , metallurgy
We present a CMOS compatible mass manufacturable, compact Si/SiO(2) multilayer GRIN lens mode size converter from standard single mode fiber to 300 nm-thick Si waveguide. The fiber-to-GRIN lens coupling loss is 2.6 ± 0.3 dB (coupling efficiency: 51~60%) with optimized focal length of 11.6~11.8 μm and Si/SiO(2) multilayer thickness of 7.4 μm.