Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe | Zendy

Xiaojing Mu | Zendy; Guangya Zhou | Zendy; Hongbin Yu | Zendy; Yu Du | Zendy; Hanhua Feng | Zendy; Julius M. Tsai | Zendy; Fook Siong Chau | Zendy

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Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe

Author(s) -

Xiaojing Mu,

Guangya Zhou,

Hongbin Yu,

Yu Du,

Hanhua Feng,

Julius M. Tsai,

Fook Siong Chau

Publication year - 2012

Publication title -

optics express

Language(s) - Uncategorized

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.20.006325

Subject(s) - microelectromechanical systems , optics , actuator , materials science , optical coherence tomography , reflector (photography) , microactuator , beam (structure) , chevron (anatomy) , optoelectronics , computer science , light source , physics , geology , paleontology , artificial intelligence

A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection.

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