Open AccessCompact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe
Author(s) -
Xiaojing Mu,
Guangya Zhou,
Yu Huang,
Yu Du,
Hua Feng,
J. M. Tsai,
Fook Siong Chau
Publication year - 2012
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.006325
Subject(s) - microelectromechanical systems , optics , actuator , materials science , optical coherence tomography , reflector (photography) , microactuator , beam (structure) , chevron (anatomy) , optoelectronics , computer science , light source , physics , geology , paleontology , artificial intelligence
A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection.