Open AccessError analysis of a plane mirror interferometer based on geometric optical paths
Author(s) -
Shanzhi Tang,
Wei Zhao,
Lihong Zhong,
Jianmin Gao,
Junjie Guo
Publication year - 2012
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.005108
Subject(s) - interferometry , optics , displacement (psychology) , observational error , physics , refractive index , plane (geometry) , computer science , mathematics , geometry , psychology , statistics , psychotherapist
Plane mirror interferometer is a common way for the precision displacement measurement. However, during the measurement, it still suffers from disturbances such as misalignments, rotations and air refractive index fluctuations, which lead to poor accuracy. Traditional error analysis is rather limited in the static state and separation of the disturbances. In this paper, displacement measurement errors are analyzed, which are caused by the disturbed factors for a plane mirror interferometer. Then error modeling, which based on the geometric optical paths, is carried out by the partial differentiation theory. Moreover, the characteristics of the error are discussed by using this model. It is suggested that this model can release the measurement accuracy reduction brought by coupling effects between adjustment factor of the optical paths and the rotary error of the measured object (e. g. a guideway).