Open AccessSnapshot phase sensitive scatterometry based on double-channel spectral carrier frequency concept
Author(s) -
Daesuk Kim,
Hyunsuk Kim,
Robert Magnusson,
Yong Jai Cho,
Won Chegal,
Hyun Mo Cho
Publication year - 2011
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.19.023790
Subject(s) - optics , metrology , snapshot (computer storage) , materials science , grating , ellipsometry , channel (broadcasting) , diffraction grating , computer science , physics , thin film , telecommunications , nanotechnology , operating system
Spectroscopic ellipsometry is one of the most important measurement schemes used in the optical nano-metrology for not only thin film measurement but also nano pattern 3D structure measurement. In this paper, we propose a novel snap shot phase sensitive normal incidence spectroscopic ellipsometic scheme based on a double-channel spectral carrier frequency concept. The proposed method can provide both Ψ(λ) and Δ(λ) only by using two spectra acquired simultaneously through the double spectroscopic channels. We show that the proposed scheme works well experimentally by measuring a binary grating with nano size 3D structure. We claim that the proposed scheme can provide a snapshot spectroscopic ellipsometric parameter measurement capability with moderate accuracy.