Open AccessHigh-finesse cavities fabricated by buckling self-assembly of a-Si/SiO_2 multilayers
Author(s) -
T. W. Allen,
Joshua W. Silverstone,
N. Ponnampalam,
T. Steen Olsen,
A. Meldrum,
R. G. DeCorby
Publication year - 2011
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.19.018903
Subject(s) - finesse , optics , materials science , buckling , fabry–pérot interferometer , silicon , fabrication , delamination (geology) , symmetry (geometry) , optoelectronics , composite material , physics , wavelength , geometry , medicine , paleontology , alternative medicine , mathematics , pathology , biology , subduction , tectonics
Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO(2) multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 10(3)) and quality factors (Q > 10(4) in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects. Degenerate Hermite-Gaussian and Laguerre-Gaussian modes were observed, suggesting a high degree of cylindrical symmetry. Given their silicon-based fabrication, these cavities hold promise as building blocks for integrated optical sensing systems.