Open AccessA multiple height-transfer interferometric technique
Author(s) -
Hao Yu,
Carl C. Aleksoff,
Jun Ni
Publication year - 2011
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.19.016365
Subject(s) - interferometry , optics , wavelength , calibration , materials science , remote sensing , physics , geology , quantum mechanics
We propose a multiple height-transfer interferometric technique based on concepts from both multiple wavelength interferometry and wavelength scanning interferometry. Conventional multiple wavelength interferometry requires accurate wavelength information for large step height measurement, while wavelength scanning interferometry is limited by mode-hop-free tuning range. Using the multiple reference heights, it is possible to bypass the wavelength determinations and achieve large step height measurement using relative phase changes. By applying this technique with a proposed multiple height calibration artifact, we experimentally demonstrated accuracy better than 1 micron over 100 mm in a workshop environment.