Open AccessStructural considerations on multistopband mesoporous silicon rugate filters prepared for gas sensing purposes
Author(s) -
Tero Jalkanen,
Jarno Salonen,
V. Torres-Costa,
Kazuhiro Fukami,
Tetsuo Sakka,
Yukio H. Ogata
Publication year - 2011
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.19.013291
Subject(s) - materials science , mesoporous material , porous silicon , silicon , stopband , absorption (acoustics) , optics , anodizing , optoelectronics , dispersion (optics) , visible spectrum , resonator , composite material , aluminium , biochemistry , chemistry , physics , catalysis
Different designs for producing multiple stopband mesoporous silicon rugate filters via electrochemical anodization are compared. The effects of light absorption and dispersion to visible range filter design are investigated. Thermal oxidation is applied for passivating the chemically reactive porous silicon surface, and the response of the passivated structures to ethanol vapor is examined. Differences in gas sensing properties for the various designs are evaluated and possible reasons for the observed differences are discussed. Methods for sidelobe suppression in multipeak filters are discussed and demonstrated, and their effects in gas sensing applications are estimated.