Open AccessFabrication of phase-change Ge_2Sb_2Te_5 nano-rings
Author(s) -
Cheng Hung Chu,
Ming Lun Tseng,
Chiun Da Shiue,
Shuan Wei Chen,
Hai−Pang Chiang,
Masud Mansuripur,
Din Ping Tsai
Publication year - 2011
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.19.012652
Subject(s) - materials science , fabrication , etching (microfabrication) , optics , isotropic etching , nanometre , laser , substrate (aquarium) , laser beams , phase (matter) , nano , refractive index , optoelectronics , thermal , nanoscopic scale , irradiation , differential thermal analysis , nanotechnology , diffraction , composite material , layer (electronics) , chemistry , alternative medicine , oceanography , pathology , nuclear physics , medicine , physics , organic chemistry , meteorology , geology
Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate.