Open AccessTwo-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer
Author(s) -
Hung Lin Hsieh,
Jyh Chen Chen,
Gilles Lérondel,
Ju Yi Lee
Publication year - 2011
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.19.009770
Subject(s) - optics , grating , interferometry , heterodyne (poetry) , heterodyne detection , physics , optical path , displacement (psychology) , astronomical interferometer , lock in amplifier , amplifier , laser , optoelectronics , acoustics , psychology , cmos , psychotherapist
A method based on a specific quasi-common-optical-path (QCOP) configuration for two-dimensional displacement measurement is presented. The measurement system consists of a heterodyne light source, two-dimensional holographic grating, specially designed set of half wave plates, and lock-in amplifiers. Two measurement configurations, for single and differential detection, are designed. The sensitivity, resolution and nonlinear phase error of the differential detection type are better than those of the single detection type. The experimental results demonstrate that the QCOP interferometer has the ability to measure two-dimensional displacement while maintaining high system stability.