Open AccessDefect detection and property evaluation of indium tin oxide conducting glass using optical coherence tomography
Author(s) -
Meng-Tsan Tsai,
Fu Chang,
Ya Ju Lee,
Jiann Der Lee,
HsiangChen Wang,
Cheng Kuang Lee
Publication year - 2011
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.19.007559
Subject(s) - optical coherence tomography , materials science , refractive index , optics , indium tin oxide , substrate (aquarium) , tomography , attenuation coefficient , optoelectronics , thin film , nanotechnology , oceanography , physics , geology
This study demonstrates a new approach for evaluating the properties of indium tin oxide (ITO) conducting glass and identifying defects using optical coherence tomography (OCT). A swept-source OCT system was implemented to scan the ITO conducting glass to enable two-dimensional or three-dimensional imaging. With OCT scanning, the defects can be clearly identified at various depths. Several parameters in addition to morphological information can be estimated simultaneously, including the thickness of the glass substrate, the refractive index, reflection coefficient, and transmission coefficient, all of which can be used to evaluate the quality of ITO conducting glass. This study developed a modified method for evaluating the refractive index of glass substrates without having to perform multiple scans as well as a segmentation algorithm to separate the interfaces. The results show the potential of OCT as an imaging tool for the inspection of defects in ITO conducting glass.