Open AccessBrightness field distributions of microlens arrays using micro molding
Author(s) -
Hsin Chung Cheng,
Chiung Fang Huang,
Yi Lin,
Yung Kang Shen
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.026887
Subject(s) - microlens , materials science , brightness , optics , molding (decorative) , electroforming , photoresist , lithography , optoelectronics , lens (geology) , physics , nanotechnology , composite material , layer (electronics)
This study describes the brightness field distributions of microlens arrays fabricated by micro injection molding (μIM) and micro injection-compression molding (μICM). The process for fabricating microlens arrays used room-temperature imprint lithography, photoresist reflow, electroforming, μIM, μICM, and optical properties measurement. Analytical results indicate that the brightness field distribution of the molded microlens arrays generated by μICM is better than those made using μIM. Our results further demonstrate that mold temperature is the most important processing parameter for brightness field distribution of molded microlens arrays made by μIM or μICM.