z-logo
open-access-imgOpen Access
Perturbation method for the Rigorous Coupled Wave Analysis of grating diffraction
Author(s) -
Kofi Edee,
Jean-Píerre Plumey,
Gérard Granet,
Jérôme Hazart
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.026274
Subject(s) - grating , optics , diffraction grating , diffraction , perturbation (astronomy) , rigorous coupled wave analysis , diffraction efficiency , physics , eigenvalues and eigenvectors , quantum mechanics
The perturbation method is combined with the Rigorous CoupledWave Analysis (RCWA) to enhance its computational speed. In the original RCWA, a grating is approximated by a stack of lamellar gratings and the number of eigenvalue systems to be solved is equal to the number of subgratings. The perturbation method allows to derive the eigensolutions in many layers from the computed eigensolutions of a reference layer provided that the optical and geometrical parameters of these layers differ only slightly. A trapezoidal grating is considered to evaluate the performance of the method.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.
Having issues? You can contact us here