Open AccessLarge range and high resolution on-line displacement measurement system by combining double interferometres
Author(s) -
Fang Xie,
Min Li,
Ding Song,
Jun-hong Sun,
Tao Zhang
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.024961
Subject(s) - optics , interferometry , wavelength , signal (programming language) , system of measurement , displacement (psychology) , millimeter , physics , resolution (logic) , dynamic range , line (geometry) , materials science , computer science , psychology , geometry , mathematics , astronomy , artificial intelligence , psychotherapist , programming language
A stabilized interferometric displacement measurement system, which is suitable for on-line measurement and is endowed with large measurement range and high resolution, is proposed. The system is stabilized by a feedback loop which compensates the influences induced by the environmental disturbances and makes the system stabile enough for on-line measurement. Two different wavelengths are working simultaneously in the system. The measurement range which is determined by the synthetic-wavelength interferometric signal is expanded to the order of millimeter, while the measurement resolution which is determined by one of the single-wavelength interferometric signal is the order of sub-nanometer.