Large range and high resolution on-line displacement measurement system by combining double interferometres | Zendy

Fang Xie | Zendy; Min Li | Zendy; Ding Song | Zendy; Jinling Sun | Zendy; Tao Zhang | Zendy

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Large range and high resolution on-line displacement measurement system by combining double interferometres

Author(s) -

Fang Xie,

Min Li,

Ding Song,

Jinling Sun,

Tao Zhang

Publication year - 2010

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.18.024961

Subject(s) - optics , interferometry , wavelength , signal (programming language) , system of measurement , displacement (psychology) , millimeter , physics , resolution (logic) , dynamic range , line (geometry) , materials science , computer science , psychology , geometry , mathematics , astronomy , artificial intelligence , psychotherapist , programming language

A stabilized interferometric displacement measurement system, which is suitable for on-line measurement and is endowed with large measurement range and high resolution, is proposed. The system is stabilized by a feedback loop which compensates the influences induced by the environmental disturbances and makes the system stabile enough for on-line measurement. Two different wavelengths are working simultaneously in the system. The measurement range which is determined by the synthetic-wavelength interferometric signal is expanded to the order of millimeter, while the measurement resolution which is determined by one of the single-wavelength interferometric signal is the order of sub-nanometer.

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