Open AccessHigh power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array
Author(s) -
Zhenfu Wang,
Yongqiang Ning,
Yan Zhang,
Jingjing Shi,
Xing Zhang,
Lisen Zhang,
Wei Wang,
Di Liu,
Yongsheng Hu,
Haibing Cong,
Li Qin,
Yun Liu,
Lijun Wang
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.023900
Subject(s) - microlens , materials science , optics , optoelectronics , laser beam quality , vertical cavity surface emitting laser , etching (microfabrication) , beam (structure) , beam divergence , optical power , substrate (aquarium) , laser , power (physics) , semiconductor laser theory , lens (geology) , semiconductor , laser beams , physics , oceanography , layer (electronics) , quantum mechanics , geology , composite material
High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1 W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6° at a current of 4 A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.