Open AccessIn situ imaging of hole shape evolution in ultrashort pulse laser drilling
Author(s) -
Sven Döring,
Stefanie Richter,
Stefan Nolte,
Andreas Tünnermann
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.020395
Subject(s) - optics , laser drilling , materials science , laser , ultrashort pulse laser , laser ablation , ultrashort pulse , wavelength , in situ , ablation , laser beam machining , perpendicular , pulse (music) , physics , laser beams , detector , engineering , meteorology , aerospace engineering , geometry , mathematics
For the first time, in situ the hole shape evolution during ultrashort pulse laser drilling in semiconductor material is imaged. The trans-illumination of the sample at a wavelength of 1.06 µm is projected onto a standard CCD camera during the ablation, providing an image of the contour of the ablated structure perpendicular to the irradiation for drilling. This demonstrated technique enables a direct, high resolution investigation of the temporal evolution of the drilling process in the depth of the material without complex sample preparation or post processing.