Open AccessAll-oxide broadband antireflection coatings by plasma ion assisted deposition: design, simulation, manufacturing and re-optimization
Author(s) -
Steffen Wilbrandt,
Olaf Stenzel,
Norbert Kaiser
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.019732
Subject(s) - deposition (geology) , materials science , broadband , optics , oxide , optical coating , plasma , ion , ion plating , optoelectronics , computer science , thin film , nanotechnology , chemistry , physics , geology , metallurgy , paleontology , organic chemistry , quantum mechanics , sediment
A new all-oxide design for broadband antireflection coatings with significantly reduced impact of deposition errors to the final reflectance is presented. Computational manufacturing including re-optimization during deposition has been used in the design work to account for maximum insensibility of the design with respect to deposition errors typical for plasma ion assisted deposition PIAD. Repeated deposition runs with the deducted monitoring and re-optimization strategy verify the validity of the simulations and the stability of the derived design solution.