Open AccessBiochemical sensing with a polymer-based micromachined Fabry-Perot sensor
Author(s) -
Tianhua Zhang,
Shantan Talla,
Zhongcheng Gong,
Sukrut Karandikar,
Rebecca Giorno,
Long Que
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.018394
Subject(s) - fabry–pérot interferometer , materials science , refractive index , interferometry , optics , surface micromachining , optoelectronics , substrate (aquarium) , white light interferometry , polymer , fabrication , wavelength , medicine , oceanography , physics , alternative medicine , pathology , composite material , geology
A white-light source operated polymer-based micromachined Fabry-Perot biochemical sensor is reported. As a refractive-index sensitive optical sensor, its transducing signal varies upon the changes of the effective refractive index in the Fabry-Perot cavity. This sensor is fabricated from PDMS and glass. More specifically, this sensor is a micromachined Fabry-Perot interferometer (microFPI) and is fabricated by bonding a glass substrate and the soft-lithographically patterned PDMS. Several biochemicals have been detected with the microFPI biochemical sensors. Measurements show that rabbit IgG at a concentration of as low as 5 to 50 ng/ml can be detected even without any performance optimization of the devices.