Open AccessImproving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing
Author(s) -
Axel Wiegmann,
Michael Schulz,
Clemens Elster
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.015807
Subject(s) - equidistant , optics , resolution (logic) , image resolution , shearing (physics) , observational error , materials science , physics , computer science , mathematics , geometry , artificial intelligence , statistics , composite material
We present a method to enhance the achievable lateral resolution of a multi-sensor scanning profile measurement method. The relationship between the profile measurement method considered and established shearing techniques is illustrated. Simulation and measurement results show that non-equidistant sensor spacing can improve the lateral resolution significantly.