Open AccessPlanar and ridge waveguides formed in LiNbO_3 by proton exchange combined with oxygen ion implantation
Author(s) -
Shaomei Zhang,
KeMing Wang,
Xiangzhi Liu,
Zhuanfang Bi,
Xiuhong Liu
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.015609
Subject(s) - lithium niobate , materials science , waveguide , optics , planar , ion , proton , refractive index , ion implantation , optoelectronics , chemistry , physics , computer graphics (images) , organic chemistry , quantum mechanics , computer science
We report on the fabrication of planar and ridge waveguides in lithium niobate by proton exchange combined with oxygen ion implantation. The implanted energy ranges from 600 to 1400 keV with a dose of 1 x 10(15) ions/cm(2). The modes in proton exchanged waveguide can be modulated by O ion implantation. There are different damage profiles in proton-exchanged and ion-implanted waveguides in Rutherford backscattering/channeling spectra. The refractive index profile in single-mode waveguide in lithium niobate has been obtained based on Intensity Calculation Method. Also ridge waveguide was fabricated on the basis of planar waveguide by Ar ion beam etching. The measured near-field intensity distributions of the ridge waveguide modes show a reasonable agreement with the simulated ones. The estimated propagation loss was approximately 2.2 dB/cm.