Open AccessEllipsometric measurement technique for a modified Otto configuration used for observing surface-plasmon resonance
Author(s) -
Tatsuya Iwata,
Yasuhiro Mizutani
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.014480
Subject(s) - materials science , prism , optics , layer (electronics) , surface plasmon resonance , dielectric , resonance (particle physics) , surface plasmon , refractive index , substrate (aquarium) , triangular prism , optoelectronics , plasmon , nanotechnology , physics , atomic physics , nanoparticle , geology , oceanography
In order to carry out precise measurements of the thickness of a dielectric layer deposited on a metal surface, we have introduced an ellipsometric measurement technique (EMT) to the modified Otto's configuration (MOC) that is used for observing surface plasmon resonance (SPR). For that purpose, we have measured the thickness of the Au layer by the EMT at four different locations on an elliptic fringe pattern obtained from the MOC basing on a four-layer structure model: prism (BK7)-air-Ausubstrate (BK7). Then, we have measured that of a TiO(2) layer deposited on the Au layer by the EMT basing on a five-layer structure model: prism (BK7)-air-TiO(2)-Au-substrate (BK7). We have found experimentally that the combination of EMT and MOC is effective for measuring the thickness of the dielectric layer on the metal.