Open AccessNanoscale imaging using deep ultraviolet digital holographic microscopy
Author(s) -
Ahmad Faridian,
David Hopp,
Giancarlo Pedrini,
Ulrike Eigenthaler,
Michael Hirscher,
Wolfgang Osten
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.014159
Subject(s) - optics , digital holographic microscopy , holography , microscope , microscopy , digital holography , materials science , resolution (logic) , nanoscopic scale , image resolution , optical microscope , physics , computer science , nanotechnology , scanning electron microscope , artificial intelligence
A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup.