Polarization insensitive resonance-domain blazed binary gratings | Zendy

Heikki Hyvärinen | Zendy; Petri Karvinen | Zendy; Jari Turunen | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Polarization insensitive resonance-domain blazed binary gratings

Author(s) -

Heikki Hyvärinen,

Petri Karvinen,

Jari Turunen

Publication year - 2010

Publication title -

optics express

Language(s) - Uncategorized

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.18.013444

Subject(s) - optics , electron beam lithography , polarization (electrochemistry) , binary number , materials science , lithography , rigorous coupled wave analysis , diffraction efficiency , fourier transform , diffraction grating , physics , diffraction , resist , chemistry , layer (electronics) , arithmetic , mathematics , quantum mechanics , composite material

Three variants of binary blazed gratings with subwavelength features are considered, which have high first-order efficiencies in the non-paraxial domain for arbitrarily polarized light. A combination of effective medium theory and further parametric optimization with the Fourier modal method are used in design. Experimental demonstration is provided by electron beam lithography on a structure etched in a Si3N4 layer on top of a SiO2 substrate, with period approximately 3.5lambda at lambda = 633 nm. The measured efficiency (81% for TE and 85% for TM polarization) agrees well with the calculated value, 84%.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research