Open AccessPolarization insensitive resonance-domain blazed binary gratings
Author(s) -
Heikki Hyvärinen,
Petri Karvinen,
Jari Turunen
Publication year - 2010
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.013444
Subject(s) - optics , electron beam lithography , polarization (electrochemistry) , binary number , materials science , lithography , rigorous coupled wave analysis , diffraction efficiency , fourier transform , diffraction grating , physics , diffraction , resist , chemistry , layer (electronics) , arithmetic , mathematics , quantum mechanics , composite material
Three variants of binary blazed gratings with subwavelength features are considered, which have high first-order efficiencies in the non-paraxial domain for arbitrarily polarized light. A combination of effective medium theory and further parametric optimization with the Fourier modal method are used in design. Experimental demonstration is provided by electron beam lithography on a structure etched in a Si3N4 layer on top of a SiO2 substrate, with period approximately 3.5lambda at lambda = 633 nm. The measured efficiency (81% for TE and 85% for TM polarization) agrees well with the calculated value, 84%.