Open AccessFabrication of micro DOE using micro tools shaped with focused ion beam
Author(s) -
Zongwei Xu,
Fengzhou Fang,
Sujuan Zhang,
X. D. Zhang,
Xiaotang Hu,
Yusheng Fu,
L. Li
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.008025
Subject(s) - focused ion beam , materials science , fabrication , design of experiments , enhanced data rates for gsm evolution , optics , beam (structure) , facet (psychology) , nanoscopic scale , nano , nanotechnology , computer science , ion , composite material , medicine , telecommunications , social psychology , psychology , statistics , physics , alternative medicine , mathematics , personality , pathology , quantum mechanics , big five personality traits
A novel method is proposed to fabricate micro Diffractive Optical Elements (DOE) using micro cutting tools shaped with focused ion beam (FIB) milling. Micro tools with nanometric cutting edges and complicated shapes are fabricated by controlling the tool facet's orientation relative to the FIB. The tool edge radius of less than 30 nm is achieved for the nano removal of the work materials. Semi-circular micro tools and DOE-shaped micro tools are developed to fabricate micro-DOE and sinusoidal modulation templates. Experiments show that the proposed method can be a high efficient way in fabricating micro-DOE with nanoscale surface finishes.