Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator | Zendy

Taro Ikeda | Zendy; Kazunori Takahashi | Zendy; Yoshiaki Kanamori | Zendy; Kazuhiro Hane | Zendy

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Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator

Author(s) -

Taro Ikeda,

Kazunori Takahashi,

Yoshiaki Kanamori,

Kazuhiro Hane

Publication year - 2010

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.18.007031

Subject(s) - phase shift module , materials science , waveguide , optics , interferometry , actuator , silicon , comb drive , silicon photonics , phase (matter) , optoelectronics , surface micromachining , silicon on insulator , optical path length , insertion loss , electrical engineering , fabrication , physics , medicine , alternative medicine , pathology , quantum mechanics , engineering

Phase shifter is an important part of optical waveguide circuits as used in interferometer. However, it is not always easy to generate a large phase shift in a small region. Here, a variable phase-shifter operating as delay-line of silicon waveguide was designed and fabricated by silicon micromachining. The proposed phase-shifter consists of a freestanding submicron-wide silicon waveguide with two waveguide couplers and an ultrasmall silicon comb-drive actuator. The position of the freestanding waveguide is moved by the actuator to vary the total optical path. Phase-shift was measured in a Mach-Zehnder interferometer to be 3.0pi at the displacement of 1.0 mum at the voltage of 31 V. The dimension of the fabricated device is 50microm wide and 85microm long.

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