Open AccessLarge area, freestanding GaN nanocolumn membrane with bottom subwavelength nanostructure
Author(s) -
Yongjin Wang,
Fangren Hu,
Yoshiaki Kanamori,
Tong Wu,
Kazuhiro Hane
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.005504
Subject(s) - materials science , silicon , optoelectronics , nanostructure , silicon on insulator , substrate (aquarium) , refractive index , microelectromechanical systems , anti reflective coating , coating , optics , nanotechnology , oceanography , physics , geology
We propose, fabricate and characterize the freestanding GaN nanocolumn membrane with bottom subwavelength nanostructures. The GaN nanocolumns are epitaxially grown on freestanding nanostructured silicon substrate that is achieved by a combination of self-assemble technique and silicon-on-insulator (SOI) technology. Optical reflection is greatly suppressed in the visible range due to the graded refractive index effect of subwavelength nanostructures. The freestanding GaN nanocolumn membrane is realized by removing silicon substrate from the backside, eliminating the silicon absorption of the emitted light and leading to a strong blue emission from the bottom side. The obtained structures also demonstrate the potential application for anti-reflective (AR) coating and GaN-Si hybrid microelectromechanical system (MEMS).