Open AccessPillar-array based optical sensor
Author(s) -
Tao Xu,
Ning Zhu,
Michelle Xu,
Lech Wosinski,
J. S. Aitchison,
Harry E. Ruda
Publication year - 2010
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.005420
Subject(s) - refractive index , materials science , optics , pillar , wavelength , resonance (particle physics) , q factor , optoelectronics , transmission (telecommunications) , resonator , telecommunications , physics , structural engineering , particle physics , computer science , engineering
An optical microcavity based on pillar arrays has been fabricated in Si/SiO(2) material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with different aspect ratios.