Pillar-array based optical sensor | Zendy

Tao Xu | Zendy; Ning Zhu | Zendy; Michelle Xu | Zendy; Lech Wosinski | Zendy; J. S. Aitchison | Zendy; Harry E. Ruda | Zendy

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Pillar-array based optical sensor

Author(s) -

Tao Xu,

Ning Zhu,

Michelle Xu,

Lech Wosinski,

J. S. Aitchison,

Harry E. Ruda

Publication year - 2010

Publication title -

optics express

Language(s) - Uncategorized

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.18.005420

Subject(s) - refractive index , materials science , optics , pillar , wavelength , resonance (particle physics) , q factor , optoelectronics , transmission (telecommunications) , resonator , telecommunications , physics , structural engineering , particle physics , computer science , engineering

An optical microcavity based on pillar arrays has been fabricated in Si/SiO(2) material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with different aspect ratios.

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