Open AccessDigital holographic reflectometry
Author(s) -
Tristan Colomb,
Stefan Krivec,
Herbert Hutter,
Ahmet Ata Akatay,
Nicolas Pavillon,
Frédéric Montfort,
Etienne Cuche,
Jonas Kühn,
Christian Depeursinge,
Yves Emery
Publication year - 2010
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.003719
Subject(s) - optics , reflectometry , profilometer , materials science , wavefront , digital holographic microscopy , holography , interferometry , digital holography , reflection (computer programming) , holographic interferometry , refractive index , phase (matter) , surface finish , physics , time domain , quantum mechanics , computer science , composite material , computer vision , programming language
Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO(2)/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.