Open AccessUV trimming of Polarization-independent Microring Resonator by Internal Stress and Temperature Control
Author(s) -
Naoki Kobayashi,
Tomoyuki Sato,
Yasuo Kimura
Publication year - 2010
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.18.000906
Subject(s) - trimming , resonator , optics , materials science , polarization (electrochemistry) , wavelength , internal stress , optoelectronics , physics , composite material , chemistry , computer science , operating system
The temperature dependence of the resonant wavelength of vertically coupled microring resonator can be controlled via internal stress caused by the thermo-optic and photo-elastic effects. In the case of strong internal stress, a polarization-independent microring resonator can be realized by controlling the device surface temperature using a heater module; the temperature dependence of TE and TM polarizations are different due to the internal stress and thus manipulating temperatures, the resonant wavelengths for TE and TM can be equalized at a specific temperature. In this study, the UV trimming of polarization-independent wavelength was demonstrated using UV-sensitive SiON as a core material. The temperature dependence of TE polarization was almost athermalized and that of TM was made negative by controlling internal stress. As a result, the simultaneous realization of the UV trimming and the polarization-independent microring was made possible more easily than before; the UV trimming can be done at room temperature due to the athermalized resonant wavelength for TE polarization.