Open AccessFabrication of optical waveguides by imprinting: Usage of positive tone resist as a mould for UV-curable polymer
Author(s) -
Jussi Hiltunen,
Marianne Hiltunen,
Jarkko Puustinen,
Jyrki Lappalainen,
Pentti Karioja
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.022813
Subject(s) - materials science , optics , fabrication , waveguide , resist , wafer , optoelectronics , single mode optical fiber , optical fiber , wavelength , multi mode optical fiber , nanotechnology , medicine , physics , alternative medicine , pathology , layer (electronics)
Optical ridge type waveguides based on UV-curable polymer were fabricated by imprinting method. Positive tone resist patterned on a silicon wafer was used as a mould. The characterization of waveguides was carried out by coupling TE-polarized light from a tapered fiber into a waveguide with 30 mm length and mapping the intensity distribution with another tapered fiber at the output facet of a waveguide. Proper single- or multimode operation was observed depending on the waveguide width being either 2 microm or 6 microm. Experimental observations on the mode profiles were also supported by the simulation results. Average power transmissions of 32% at 1530 nm wavelength and 45% at 1310 nm wavelength were characterized. The results suggest that the simple mould fabrication process might be a useful technique for device prototyping and that the performance of replicated waveguides can meet the requirements for certain applications.