Open AccessEfficient fiber coupler for vertical silicon slot waveguides
Author(s) -
Hongcheng Sun,
Antao Chen,
Attila Szep,
Larry R. Dalton
Publication year - 2009
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.022571
Subject(s) - materials science , optics , coupling loss , waveguide , silicon , silicon on insulator , wafer , photolithography , optical fiber , electron beam lithography , single mode optical fiber , optoelectronics , refractive index , insertion loss , resist , physics , layer (electronics) , composite material
A mode size converter for efficient fiber coupling to silicon slot waveguides was proposed and demonstrated. It consists of two inverted lateral tapers that extend from the two strips of the silicon slot waveguide, and an overlaid low index waveguide with expanded mode size. Parameters including taper length and taper tip width were optimized with computer simulations. Samples were fabricated with a combined electron beam and photolithography process on a silicon-on-insulator wafer. The measured coupling loss to a standard single mode optical fiber was reduced by 8 dB for TE mode and 5.2 dB for TM mode with the converter.