Open AccessNanoSi low loss horizontal slot waveguides coupled to high Q ring resonators
Author(s) -
R. Guider,
N. Daldosso,
Alessandro Pitanti,
E. Jordana,
Jean-Marc Fédéli,
L. Pavesi
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.020762
Subject(s) - resonator , materials science , silicon , optics , annealing (glass) , optoelectronics , silicon oxide , q factor , composite material , physics , silicon nitride
Si-based horizontal slot waveguides coupled to ring resonators have been fabricated and characterised. The central layer of the slot has been filled by Silicon nanocrystals (Si-nc) obtained by deposition of silicon rich silicon oxide and then thermal annealing. A comparison of various deposition and annealing parameters to form the Si-nc is performed. Propagation losses as low as 3 dB/cm and ring resonator quality factor of 30,000 have been achieved at 1550 nm.