Open AccessAdjusting resonant wavelengths and spectral shapes of ring resonators using a cladding SiN layer or KOH solution
Author(s) -
Sahnggi Park,
Kap-Joong Kim,
Jong-Moo Lee,
In-Gyoo Kim,
Gyungock Kim
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.011884
Subject(s) - cladding (metalworking) , materials science , photolithography , resonator , optics , lithography , wavelength , silicon nitride , optoelectronics , optical ring resonators , electron beam lithography , split ring resonator , nitride , layer (electronics) , silicon , resist , composite material , physics
It is shown that the resonant frequencies and the transmission spectra of ring resonators can be adjusted by depositing or etching the cladding nitride layer on the ring waveguide without introducing an extra loss or extra variations of channel spacing. The cladding nitride layer increases the minimum width of the gap in the coupling region to larger than 150nm which makes it possible to consider photolithography instead of E-beam lithography for the typical design rule of ring filters. KOH silicon etching can also adjust not only the resonance frequencies but also coupling coefficients with a small sacrifice of guiding loss.