Open AccessSuppression of aliasing in multi-sensor scanning absolute profile measurement
Author(s) -
Axel Wiegmann,
Michael Schulz,
Clemens Elster
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.011098
Subject(s) - aliasing , optics , chirp , nyquist frequency , interferometry , amplitude , anti aliasing filter , materials science , physics , acoustics , computer science , telecommunications , laser , undersampling , bandwidth (computing) , digital filter , root raised cosine filter
The task of anti-aliasing in absolute profile measurement by multi-sensor scanning techniques is considered. Simulation results are presented which demonstrate that aliasing can be highly reduced by a suitable choice of the scanning steps. The simulation results were confirmed by results obtained for interferometric measurements (Nyquist frequency 1/646 microm(-1)) on a specifically designed chirp specimen with sinusoidal waves of amplitude 100 nm and wavelengths from 2.5 mm down to 19 microm.