Open AccessLaser drilling of nano-pores in sandwiched thin glass membranes
Author(s) -
Minrui Yu,
HyunSeok Kim,
Robert H. Blick
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.010044
Subject(s) - borosilicate glass , materials science , membrane , laser , optics , excimer laser , thin film , layer (electronics) , wavelength , nano , laser drilling , excimer , refractive index , drill , composite material , optoelectronics , nanotechnology , genetics , physics , metallurgy , biology
We report on a novel method of using an excimer laser to drill ultra-small pores in borosilicate glass membranes. By introducing a thin layer of liquid between sandwiches of two glass slides, we can shrink the pore size and smoothen the surface on the exit side. We are able to push the minimal exit pore diameter down to 90 nm, well below the laser wavelength of 193 nm. This is achieved with substrates over 150 microm thick. Compared to other methods, this technique is fast, inexpensive, and produces high quality smooth pores.