Low loss etchless silicon photonic waveguides | Zendy

Jaime Cárdenas | Zendy; Carl B. Poitras | Zendy; Jacob T. Robinson | Zendy; Kyle Preston | Zendy; Long Chen | Zendy; Michal Lipson | Zendy

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Low loss etchless silicon photonic waveguides

Author(s) -

Jaime Cárdenas,

Carl B. Poitras,

Jacob T. Robinson,

Kyle Preston,

Long Chen,

Michal Lipson

Publication year - 2009

Publication title -

optics express

Language(s) - Uncategorized

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.17.004752

Subject(s) - materials science , bend radius , optics , silicon , etching (microfabrication) , waveguide , radius , silicon photonics , bending , photonics , optoelectronics , physics , nanotechnology , composite material , computer security , layer (electronics) , computer science

We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 microm. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 microm bending radius.

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