Open AccessPropagation loss study of very compact GaAs/AlGaAs substrate removed waveguides
Author(s) -
Jang-Uk Shin,
YingLan Chang,
Nadir Dagli
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.003390
Subject(s) - materials science , optics , waveguide , refractive index , substrate (aquarium) , insertion loss , transmission loss , optoelectronics , gallium arsenide , surface roughness , surface finish , physics , composite material , oceanography , geology
Very compact GaAs/AlGaAs optical waveguides with propagation loss as low as 0.9 dB/cm at lambda=1.55 microm were demonstrated using substrate removal and evaporated Si for index loading. Loss components were identified and minimized through process and waveguide design. Process induced roughness contributed significantly to overall propagation loss. Therefore a low damage process in addition to proper waveguide design is needed for loss minimization.