Open AccessLaser Doppler distance sensor using phase evaluation
Author(s) -
Philipp Günther,
Thorsten Pfister,
Lars Büttner,
Jürgen Czarske
Publication year - 2009
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.002611
Subject(s) - optics , doppler effect , laser doppler velocimetry , position (finance) , interference (communication) , phase (matter) , laser , physics , distance measurement , materials science , computer science , telecommunications , artificial intelligence , medicine , blood flow , channel (broadcasting) , finance , quantum mechanics , astronomy , economics
This paper presents a novel optical sensor which allows simultaneous measurements of axial position and tangential velocity of moving solid state objects. An extended laser Doppler velocimeter setup is used with two slightly tilted interference fringe systems. The distance to a solid state surface can be determined via a phase evaluation. The phase laser Doppler distance sensor offers a distance resolution of 150 nm and a total position uncertainty below 1 microm. Compared to conventional measurement techniques, such as triangulation, the distance resolution is independent of the lateral surface velocity. This advantage enables precise distance and shape measurements of fast rotating surfaces.