Open AccessHigh speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity
Author(s) -
Chu-Shik Kang,
Jong-Ahn Kim,
Tae Bong Eom,
Roma Jang,
Hae Yong Park,
Jae Wan Kim
Publication year - 2009
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.17.001442
Subject(s) - fabry–pérot interferometer , optics , interferometry , laser , materials science , injection locking , phase (matter) , laser diode , diode , confocal , optoelectronics , physics , quantum mechanics
We present a high speed phase shifting interferometer which utilizes the self injection locking of a frequency tunable laser diode. By using a confocal Fabry-Perot cavity made of ultra low expansion glass, and linearly modulating the laser diode current, the laser frequency could be injection locked to the resonant modes of the Fabry-Perot cavity consecutively. It provided equal phase steps to the interferograms which are ideal to be analyzed by the Carré algorithm. The phase step error was evaluated to be about 3 MHz which corresponds to 0.2 nm in length measurement. With this technique, profile measurements are insensitive to external vibration since four 640x480 pixels images can be acquired within 4 ms. Difference of two profile measurements, each made with and without vibration isolation, respectively, was evaluated to be 0.5 nm (rms).