Open AccessGeometrical analysis of third-order aberrations for a solid immersion lens
Author(s) -
Matthew J. Lang,
Eric Aspnes,
Tom D. Milster
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.020008
Subject(s) - optics , tolerance analysis , lens (geology) , wavefront , curvature , spherical aberration , refractive index , immersion (mathematics) , materials science , physics , mathematics , geometry , engineering drawing , engineering
This paper gives a treatment for finding 3rd order aberrations in solid-immersion lenses (SIL) using spherical-aberration as the basis for a polynomial power expansion of the wavefront. Unlike previous work, the treatment is general for any incident and lens media, for any lens thickness, and any chief-ray specification. Using this treatment, a tolerance analysis is given with particular discussion on thickness tolerance and limitations on field of view. Major findings include very tight thickness tolerance for high-index hyperhemisphere SILs and a thickness tolerance window for hemispheres skewed to values less than the radius of curvature of the lens.