Open AccessEnhanced antireflecting properties of micro-structured top-flat pyramids
Author(s) -
R. Bouffaron,
Ludovic Escoubas,
JeanJacques Simon,
Ph. Torchio,
F. Flory,
Gérard Berginc,
Ph. Masclet
Publication year - 2008
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.019304
Subject(s) - optics , photonic crystal , materials science , anti reflective coating , broadband , wavelength , rigorous coupled wave analysis , silicon , optoelectronics , physics , diffraction grating , nanotechnology , layer (electronics)
This paper aims at modeling bi-periodic micro-structured silicon surfaces exhibiting broadband antireflection properties in the infrared range using Rigorous Coupled-Wave Analysis (RCWA). These structures of pyramidal shape, which typical dimensions are smaller than the wavelength, are not in the Effective Medium Theory (EMT) validity domain. The influence of various opto-geometrical parameters such as period, depth, shape of the pattern is examined. The antireflective properties of such bi-periodic patterned surfaces are then discussed using the photonic crystal theory and photonic band diagrams description. Correlations between the density of Bloch modes, their localizations with respect to the incident medium light line and the surface reflectance are presented.