Open AccessDeep microstructure topography characterization with optical vortex interferometer
Author(s) -
Jan Masajada,
Monika Leniec,
E. Jankowska,
Hugo Thienpont,
Heidi Ottevaere,
Virginia Gómez
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.019179
Subject(s) - optics , interferometry , diffraction , materials science , characterization (materials science) , vortex , image resolution , optical microscope , physics , scanning electron microscope , thermodynamics
We report on a new method of inspecting deep microstructures manufactured in transparent media. Although their lateral dimension (tens of microns) do not exceed the diffraction limit for optical microscopy resolution, their deepness makes the nondestructive measurements practically impossible with presently available methods. We show that the optical vortex interferometer with a vortex generator can be used to differentiate between the samples of good and poor quality. The measurement system is simple and the interpretation of the results is straightforward.