Open AccessIntegrated optical sensor using a liquid-core waveguide in a Mach-Zehnder interferometer
Author(s) -
Patrick Dumais,
Claire L. Callender,
Julian P. Noad,
Christopher J. Ledderhof
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.018164
Subject(s) - interferometry , mach–zehnder interferometer , optics , materials science , refractive index , refractometry , photolithography , waveguide , core (optical fiber) , polarization (electrochemistry) , silicon , optoelectronics , physics , chemistry
We demonstrate experimentally an optical sensor based on a monolithically integrated Mach-Zehnder interferometer comprising a liquid-core waveguide in one of the optical paths. The device is fabricated with a technique for self-forming microchannels in silica-on-silicon using standard photolithography and deposition processes. Refractometry with a resolution of better than 4x10(-6) is demonstrated using the thermo-optic effect of the liquid medium to vary its refractive index. The polarization dependence of the device response is analyzed.