Open AccessNormal vector method for the RCWA with automated vector field generation
Author(s) -
Peter Götz,
Thomas Schuster,
Karsten Frenner,
Stephan Rafler,
Wolfgang Osten
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.017295
Subject(s) - rigorous coupled wave analysis , factorization , optics , convergence (economics) , grating , fourier transform , computer science , algorithm , field (mathematics) , physics , diffraction grating , mathematics , pure mathematics , quantum mechanics , economic growth , economics
Early formulations of the RCWA yield, implicated by the erroneous application of factorization rules to discrete Fourier transformations, poor convergence in certain cases. An explanation for this finding and an approach to overcome the problem for crossed gratings was first given by Li [J. Opt. Soc. Am. A 13, 1870 (1996) and 14, 2758 (1997)]. A further improvement was achieved by Schuster et al. [J. Opt. Soc. Am. A 24, 2880 (2007)], using a structure dependent normal vector (NV) field. While it is trivial to create those NV fields for simple geometrical shapes, to our knowledge an appropriate algorithm for arbitrary shapes does not exist, yet. In this work we present such an algorithm.