Open AccessSi lattice parameter measurement by centimeter X-ray interferometry
Author(s) -
Luca Ferroglio,
Giovanni Mana,
Enrico Massa
Publication year - 2008
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.016877
Subject(s) - optics , interferometry , centimeter , lattice (music) , materials science , lattice constant , physics , diffraction , acoustics , astronomy
A combined X-ray and optical interferometer capable of centimeter displacements has been made to measure the lattice parameter of Si crystals to within a 3 x 10(-9) relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the apparatus.