Open AccessFabrication and characterization of optimized corner-cut square microresonators
Author(s) -
Elton Marchena,
Shouyuan Shi,
Dennis W. Prather
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.016516
Subject(s) - resonator , square (algebra) , finite difference time domain method , fabrication , optics , materials science , electron beam lithography , characterization (materials science) , lithography , waveguide , coupling (piping) , dry etching , etching (microfabrication) , optoelectronics , physics , nanotechnology , resist , geometry , medicine , mathematics , alternative medicine , pathology , layer (electronics) , metallurgy
In this paper we report the fabrication and characterization of waveguide coupled square resonators with modified corners, in particular the corner-cut square resonator. We employ rigorous FDTD analysis to identify an optimal corner-cut length and compare this with our experimental findings. Two- and three dimensional FDTD analysis is also used to optimize the coupling gap and the width of the coupling waveguide. Fabrication of the square microresonators on silicon-on-insulators by conventional E-beam lithography and dry etching techniques will be discussed in detail. The characterization of these corner-cut square microresonators shows good performance and excellent agreement with the rigorous electromagnetic simulations.