Open AccessIon implanted optical channel waveguides in Er^3+/MgO co-doped near stoichiometric LiNbO3: a new candidate for active integrated photonic devices operating at 15 μm
Author(s) -
Feng Chen,
Yang Tan,
Airán Ródenas
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.016209
Subject(s) - lithium niobate , materials science , ion implantation , optoelectronics , doping , photoresist , fabrication , photonics , optics , luminescence , ion , nanotechnology , chemistry , medicine , alternative medicine , physics , organic chemistry , layer (electronics) , pathology
We report on the fabrication of active optical channel waveguides in Er(3+)/MgO co-doped near stoichiometric lithium niobate crystals by means of selective low-dose oxygen ion implantation through a specially designed photoresist stripe mask. After post-implantation treatment at 260 degrees C for 1 h, the channel waveguides possess a propagation loss of approximately 1.7 dB/cm. The micro-luminescence investigation reveals that fluorescence emissions at approximately 1.5 microm in the waveguides are well preserved with respect to the bulk, exhibiting possible applications for integrated active photonic devices.