Open AccessSuperlens nano-patterning technology based on the distributed Polystyrene spheres
Author(s) -
Shuhong Li,
Chunlei Du,
Xiaochun Dong,
Lei Shi,
Xiangang Luo,
Xingzhan Wei,
Yudong Zhang
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.014397
Subject(s) - finite difference time domain method , materials science , photolithography , optics , diffraction , surface plasmon , superlens , lithography , nanophotonics , polystyrene , nano , wavelength , surface plasmon polariton , refractive index , optoelectronics , plasmon , polymer , physics , composite material
Based on surface plasmon resonant enhancement, a method to realize photolithography beyond diffraction limit by using polystyrene spheres (PSs) self-assembled on silver slab was proposed in this paper. The optimum parameters for PS with different diameters were presented. In order to verify this method, numerical simulation on a typical configuration with 1.5 microm diameter of PS was carried out by using the finite-difference time-domain (FDTD) method, and the minimum feature size of 88 nm beyond diffraction limit at 365 nm working wavelength was obtained.