Open AccessA new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient
Author(s) -
Kang Hyuck Kwon,
Bong Soo Kim,
Kyuman Cho
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.013456
Subject(s) - optics , interferometry , reflection coefficient , amplitude , diffraction , reflection (computer programming) , profilometer , spatial frequency , phase (matter) , materials science , point spread function , image resolution , resolution (logic) , microscope , physics , surface finish , quantum mechanics , artificial intelligence , computer science , composite material , programming language
A new scanning microscope scheme which can map both phase and amplitude change of the probe beam is introduced. We will show that the true surface structure can be imaged by using the results of phase measurements while the amplitude image represents the map of the magnitude of the effective local reflection coefficient (ELRC). Relation between the surface structure and the ELRC is discussed. Spatial resolution is 0.67 microm which is limited by diffraction and the precision for measuring point-to-point variation of the average height of the surface structure is a few nanometers. Potential of this microscopy on surface diagnostics is discussed.