Open AccessTerahertz profilometry at 600 GHz with 05 μm depth resolution
Author(s) -
Bernd Hils,
Mark D. Thomson,
Thomas Löffler,
Wolff von Spiegel,
C. am Weg,
Hartmut G. Roskos,
P. de Maagt,
Dominic Doyle,
Ralf D. Geckeler
Publication year - 2008
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.011289
Subject(s) - optics , profilometer , terahertz radiation , interferometry , wavelength , heterodyne (poetry) , materials science , characterization (materials science) , resolution (logic) , image resolution , surface finish , physics , computer science , artificial intelligence , acoustics , composite material
Characterization of the topography of materials by interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface is rough on the length scale of a tenth of the wavelength and more. In this case, THz radiation can provide an interesting alternative. We demonstrate heterodyne profilometry at 600 GHz as a method for the accurate determination of surface topography with an achievable expanded standard uncertainty of 0.5 mum.