Open AccessNear-field Raman imaging using optically trapped dielectric microsphere
Author(s) -
Johnson Kasim,
Ting Yu,
You Yu Meng,
Liu Jin Ping,
A. See,
Li Lain Jong,
Zexiang Shen
Publication year - 2008
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.16.007976
Subject(s) - materials science , raman spectroscopy , image resolution , optics , near field scanning optical microscope , optoelectronics , pmos logic , dielectric , raman scattering , nanotechnology , transistor , scanning electron microscope , optical microscope , voltage , physics , quantum mechanics , composite material
The stumbling block of employing Raman imaging in nanoscience and nanotechnology is the diffraction-limited spatial resolution. Several approaches have been employed to improve the spatial resolution, among which aperture and apertureless near-field Raman techniques are the most frequently used. In this letter, we report a new approach in doing near-field Raman imaging with spatial resolution of about 80 nm, by trapping and scanning a polystyrene microsphere over the sample surface in water. We have used this technique to resolve PMOS transistors with SiGe source drain stressors with poly-Si gates, as well as gold nanopatterns with excellent reproducibility.